{"ein":"341818596","kind":"company","verification":"filing-verified","name":"AXCELIS TECHNOLOGIES INC","tickers":["ACLS"],"exchanges":["Nasdaq"],"sicDescription":"Special Industry Machinery, NEC","city":"BEVERLY","state":"MA","stateOfIncorporation":"DE","cik":"0001113232","sourceName":"SEC EDGAR company submissions record","sourceUrl":"https://data.sec.gov/submissions/CIK0001113232.json","lastChecked":"2026-07-05"}